MEMS sensors for flow measurement in harsh environments
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Introduction
1
Literature review on flow sensing for harsh environments
1.1
Flow equations and turbulence scales
1.2
Flow measurement techniques
1.2.1
Historical overview
1.2.2
Hot wires
1.2.3
Wall shear stress sensors
1.2.4
Summary table
1.3
Extending MEMS anemometers to harsh environments
1.3.1
Wide bandgap materials
1.3.2
SiC as a mechanical support
1.3.3
SiC as a sensing material
1.3.4
Manufacturing challenges
2
Development of a batch fabrication process for 3C-SiC wall shear stress sensors
2.1
Fabricating electrically insulated suspended 3C-SiC resistors
2.1.1
The challenge to build calorimetric sensors
2.2
3C–SiC calorimeters
2.2.1
Dry etching process
2.2.2
Global flowchart
2.3
Characterizations
2.3.1
Characterization setup
2.3.2
TCR measurement
2.3.3
Resistance-Power characteristic
2.4
Conditioning of hot-wire sensors
2.4.1
Development of a CTA suited for SiC hot wires
2.4.2
Frequency response assessment
3
Sensor testings in real flows
3.1
Wind tunnel testings
3.2
Wind tunnel facility
3.3
Flush-mounting of sensors on the wind tunnel wall
3.4
Wall shear stress calibration
3.4.1
The Coles-Fernholz method
3.4.2
Calorimetric response to wall shear stress
3.5
Square-wave tests
3.5.1
Theory
3.6
Overheat effect
3.7
Dynamic response
Conclusion
References
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2 Development of a batch fabrication process for 3C-SiC wall shear stress sensors
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2
Development of a batch fabrication process for 3C-SiC wall shear stress sensors
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Extending MEMS anemometers to harsh environments
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Fabricating electrically insulated suspended 3C-SiC resistors