Etching process of 3C–SiC thin films · MEMS sensors for flow measurement in harsh environments

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/2 Technological developments of 3C–SiC thermal devices/2.3 Etching process of 3C–SiC thin films

#2.3 Etching process of 3C–SiC thin films

#2.3.1 Reactive Ion Etching

A review of state-of-the-art etching techniques for anisotropically etching SiC thin films

#Metal masking

#Gas mixtures

#First devices

#2.3.2 Bosch process