MEMS sensors for flow measurement in harsh environments
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Introduction
1
Literature review on flow sensing for harsh environments
1.1
Flow equations and turbulence scales
1.2
Flow measurement techniques
1.2.1
Historical overview
1.2.2
Hot wires
1.2.3
Wall shear stress sensors
1.2.4
Summary table of existing flow sensors
1.3
Adapting MEMS thermal anemometers to harsh environments
1.3.1
SiC as a material for harsh environments
1.3.2
Developments of SiC-based MEMS
1.3.3
SiC-based thermal anemometers
1.4
Objectives of this work
2
Technological developments of 3C–SiC thermal devices
2.1
Resistors from 3C–SiC films epitaxially grown on silicon
2.1.1
Heteroepitaxy of 3C–SiC on silicon wafers
2.1.2
Development of a fabrication process for suspended 3C–SiC resistors
2.1.3
Current leakage through the silicon substrate
2.2
Electric insulation of 3C–SiC resistors
2.2.1
Principle of anodic bonding
2.2.2
Transfer to borosilicate glass on the SiC side
2.2.3
Transfer to borosilicate glass on the silicon side
2.2.4
2.2.5
SiC resistance measurement
2.2.6
The challenge to build calorimetric sensors
2.3
Fabrication of SiC calorimeters
2.3.1
Design
2.3.2
Transfer to borosilicate glass
2.3.3
SoI insulation
2.3.4
Highly resistive 3C–SiC buried layer insulation
2.3.5
Characterizations
2.4
Characterizations
2.4.1
Characterization setup
2.4.2
TCR measurement
2.4.3
Resistance-Power characteristic
3
Sensor testings in real flows
3.1
Development of a CTA conditioner for SiC thermal sensors
3.1.1
Targeted operating points
3.1.2
Design of the circuit
3.1.3
Circuit board realization
3.1.4
Frequency response assessment
3.2
Calibration of the 3C–SiC calorimeter in a turbulent boundary layer
3.2.1
Sensor used
3.2.2
Wind tunnel facility
3.2.3
Flush-mounting of sensors on the wind tunnel wall
3.2.4
Measurement setup
3.2.5
Wall shear stress calibration
3.2.6
Square-wave tests
3.3
SiC sensors behavior to temperature
3.3.1
Heating power tests
3.3.2
Experimental setup
3.4
Conclusion
General conclusion
References
4
Appendix
4.1
Integration and testing of a SiC suspended wire on NACA airfoils
4.1.1
Devices
4.1.2
TCR measurement and Joule-heating characterization
4.1.3
Integration on a NACA 0018 airfoil on a tabletop wind tunnel
4.1.4
Integration on a NACA 0018 airfoil stall test on an open-jet wind tunnel
4.2
Details on the developed CTA circuit for SiC sensors
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3 Sensor testings in real flows
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3.4 Conclusion
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3.4
Conclusion
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SiC sensors behavior to temperature
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General conclusion